Low-power microwave plasma source based on a microstrip split-ring resonator

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Low-Power Microwave Plasma Source Based on a Microstrip Split-Ring Resonator

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ژورنال

عنوان ژورنال: IEEE Transactions on Plasma Science

سال: 2003

ISSN: 0093-3813

DOI: 10.1109/tps.2003.815470